Hybrid system
Hybrid system

Usage: Semiconductor industry (mixing of electronic chemicals such as photoresist, grinding solution, developer solution, etc.)


Equipment structure: Open top or closed with manhole, optional EP, spray/lining high-purity PFA, PTFE for internal polishing requirements, optional jacket and insulation


Heat exchange: If an outer jacket is installed, the material temperature can be controlled by passing cold and hot media through the outer jacket, with a temperature control accuracy of ± 1 ℃


Mixing: The spraying or lining mixing kettle adopts mechanical mixing, and the internal EP mixing kettle can choose bottom magnetic mixing, top magnetic mixing, or top mechanical mixing


After integration, it can achieve functions such as automatic feeding, automatic metering, automatic mixing, automatic temperature control, automatic pressure control, automatic discharge, online monitoring, etc


Equipment material: According to the electronic chemical grade requirements (G1, G2, G3, G4, G5), 316L EP, 304 lined PTFE/sprayed ETFE, 304 lined PFA/sprayed can be selected


Customizable Capacity: 50L~30000L


Pipe connection methods: flange type, flange type, card type


Special equipment requirements: Class I, Class II


Applicable working conditions: solid-liquid, liquid-liquid mixture, temperature 0~150 ℃, pressure -0.1~1.0MPa




Equipment features:


Equipment lined/coated with PFA can achieve a total gold impurity precipitation increment of<10ppt level


After lining/spraying, a complex and strict cleaning process, as well as clean packaging measures, ensure the cleanliness level of the equipment


Configure PTFE cleaning spray ball to ensure that all liquid receiving parts are wetted and rinsed with cleaning solvent, reducing material residue and preventing influence on the proportioning of the next batch of materials


The bottom adopts a tank bottom valve to ensure that there are no dead corners in the mixing process


Customized design and manufacturing of mixer seals ensure that there is no metal contact during the operation of the entire equipment


The agitator has undergone CFD flow field simulation, making blade selection more targeted


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